Future Advanced Semiconductor Technology Laboratory (FASTLab)

The Future Advanced Semiconductor Technology Laboratory (FASTLab) at the University of Arizona is a one-of-a-kind teaching and research facility designed to inspire and educate the next-generation semiconductor workforce. Students not only acquire core skills in semiconductor manufacturing and characterization—including vacuum technology, thin-film deposition, photolithography, and etching, but also receive training in emerging post-CMOS technologies, such as high-mobility two-dimensional materials, energy-efficient nonvolatile memories, and solid-state quantum computing.
Strategically located on the second floor of the PAS Building, FASTLab sits near the main entrance and adjacent to a large auditorium that accommodates up to 350 students, where general physics courses are taught daily to engineering and physical sciences majors. This central location naturally attracts attention from students across disciplines. Two large viewing windows allow passersby to observe the advanced semiconductor tools and ongoing experiments inside the lab, sparking curiosity and engagement with the world of semiconductor science and technology.

Benefiting from Tucson’s excellent air quality, FASTLab operates as a Class-10,000 (ISO 7) clean space without the costly infrastructure required for conventional cleanrooms. This level of cleanliness supports the fabrication of high-quality heterostructures, such as Josephson junctions for quantum computing and magnetic tunnel junctions for nonvolatile memory devices. Robust lithography performance is maintained for feature sizes above a few micrometers, which fully meets the needs of educational training and research not requiring sub-micrometer resolution. Unlike traditional cleanrooms—typically limited to two occupants per 100 square feet—FASTLab’s open design can accommodate 3–5 times more students, greatly expanding its educational impact.

Within FASTLab, students gain hands-on experience across the entire semiconductor fabrication workflow, from wafer handling, thin-film deposition, and lithography to etching, transport, and optical characterization. The facility houses industry-standard tools, offering an authentic, workforce-ready training environment. To further prepare students for future technologies, FASTLab is also equipped with room-temperature quantum computers, making the University of Arizona among the first universities in the United States to integrate real quantum computing hardware into its teaching curriculum.
Contact:
Weigang Wang (Physics and ECE) and Zafer Mutlu (MSE, ECE and Physics)
